Lithographic source and mask optimization with narrow-band...

Lithographic source and mask optimization with narrow-band level-set method

Shen, Yijiang
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Volume:
26
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.26.010065
Date:
April, 2018
File:
PDF, 2.91 MB
english, 2018
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