![](/img/cover-not-exists.png)
Lithographic source and mask optimization with narrow-band level-set method
Shen, YijiangVolume:
26
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.26.010065
Date:
April, 2018
File:
PDF, 2.91 MB
english, 2018