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Interferometric profile measurement of optical-thickness by wavelength tuning with suppression of spatially uniform error
Kim, Yangjin, Hibino, Kenichi, Mitsuishi, MamoruVolume:
26
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.26.010870
Date:
April, 2018
File:
PDF, 2.30 MB
english, 2018