Beam drift and partial probe coherence effects in EUV...

Optics Express 2018 / 04 Vol. 26; Iss. 9

Beam drift and partial probe coherence effects in EUV reflective-mode coherent diffractive imaging

Helfenstein, Patrick, Rajeev, Rajendran, Mochi, Iacopo, Kleibert, Armin, Vaz, C. A. F., Ekinci, Yasin
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Volume:
26
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.26.012242
Date:
April, 2018
File:
PDF, 10.38 MB
english, 2018
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