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Nanometer-order thermal deformation measurement by a calibrated phase-shifting digital holography system
Xia, Peng, Ri, Shien, Wang, Qinghua, Tsuda, HiroshiVolume:
26
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.26.012594
Date:
May, 2018
File:
PDF, 2.56 MB
english, 2018