Effects of combined process of reactive ion etching and dynamic chemical etching on UV laser damage resistance and surface quality of fused silica optics
Sun, Laixi, Huang, Jin, Shao, Ting, Ye, Xin, Li, Qingzhi, Jiang, Xiaodong, Wu, Weidong, Yang, Liming, Zheng, WanguoVolume:
26
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.26.018006
Date:
July, 2018
File:
PDF, 4.04 MB
english, 2018