Laser intensity-based geometry control of periodic submicron polymer structures fabricated by laser interference lithography
Garliauskas, Mantas, Stankevičius, Evaldas, Račiukaitis, GediminasVolume:
7
Language:
english
Journal:
Optical Materials Express
DOI:
10.1364/ome.7.000179
Date:
January, 2017
File:
PDF, 4.53 MB
english, 2017