Substrate-insensitive atomic layer deposition of plasmonic...

Optical Materials Express 2017 / 03 Vol. 7; Iss. 3

Substrate-insensitive atomic layer deposition of plasmonic titanium nitride films

Yu, Ing-Song, Cheng, Hsyi-En, Chang, Chun-Chieh, Lin, Yan-Wei, Chen, Hou-Tong, Wang, Yao-Chin, Yang, Zu-Po
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Volume:
7
Language:
english
Journal:
Optical Materials Express
DOI:
10.1364/ome.7.000777
Date:
March, 2017
File:
PDF, 2.81 MB
english, 2017
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