Impacts of doping on epitaxial germanium thin film quality...

Optical Materials Express 2018 / 05 Vol. 8; Iss. 5

Impacts of doping on epitaxial germanium thin film quality and Si-Ge interdiffusion

Zhou, Guangnan, Lee, Kwang Hong, Anjum, Dalaver H., Zhang, Qiang, Zhang, Xixiang, Tan, Chuan Seng, Xia, Guangrui (Maggie)
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Volume:
8
Language:
english
Journal:
Optical Materials Express
DOI:
10.1364/ome.8.001117
Date:
May, 2018
File:
PDF, 9.10 MB
english, 2018
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