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CMOS-compatible mid-IR metamaterial absorbers for out-of-band suppression in optical MEMS
Ghaderi, Mohammadamir, Shahmarvandi, Ehsan Karimi, Wolffenbuttel, Reinoud F.Volume:
8
Language:
english
Journal:
Optical Materials Express
DOI:
10.1364/ome.8.001696
Date:
July, 2018
File:
PDF, 4.20 MB
english, 2018