Insulation of thin-film parylene-C/platinum probes in saline solution through encapsulation in multilayer ALD ceramic films
Forssell, Mats, Ong, Xiao Chuan, Khilwani, Rakesh, Burak Ozdoganlar, O., Fedder, Gary K.Volume:
20
Language:
english
Journal:
Biomedical Microdevices
DOI:
10.1007/s10544-018-0307-3
Date:
September, 2018
File:
PDF, 1.59 MB
english, 2018