Nano-porous aluminum oxide membrane as filtration interface...

Microelectronic Engineering 2018 / 10 Vol. 198

Nano-porous aluminum oxide membrane as filtration interface for optical gas sensor packaging

Ma, Ying, Kaczynski, Jaroslaw, Ranacher, Christian, Roshanghias, Ali, Zauner, Markus, Abasahl, Banafsheh
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Volume:
198
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.06.013
Date:
October, 2018
File:
PDF, 1.46 MB
english, 2018
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