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Arbitrary trapezoidal illumination generation method based on variable slits for optical lithography
Lin, Dongliang, Zhang, Fang, Cheng, Weilin, Huang, HuijieVolume:
57
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.57.002827
Date:
April, 2018
File:
PDF, 1.64 MB
english, 2018