Virtual ellipsometry on layered micro-facet surfaces

Virtual ellipsometry on layered micro-facet surfaces

Wang, Chi, Wilkie, Alexander, Harcuba, Petr, Novosad, Lukas
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Volume:
25
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.25.022971
Date:
September, 2017
File:
PDF, 16.14 MB
english, 2017
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