Correlation between electrical direct current resistivity...

Optics Express 2018 / 04 Vol. 26; Iss. 8

Correlation between electrical direct current resistivity and plasmonic properties of CMOS compatible titanium nitride thin films

Viarbitskaya, S., Arocas, J., Heintz, O., Colas-Des-Francs, G., Rusakov, D., Koch, U., Leuthold, J., Markey, L., Dereux, A., Weeber, J.-C.
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Volume:
26
Language:
english
Journal:
Optics Express
DOI:
10.1364/oe.26.009813
Date:
April, 2018
File:
PDF, 2.58 MB
english, 2018
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