Preparation and characterization of DLC films by twinned...

Journal of Wuhan University of Technology-Mater. Sci. Ed. 2004 / 06 Vol. 19; Iss. 2

Preparation and characterization of DLC films by twinned ECR microwave plasma enhanced CVD for microelectromechanical systems (MEMS) applications

Xin Li, Zhen-an Tang, Xin-lu Deng, Yu-xiu Shen, Hai-tao Ding
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Volume:
19
Language:
english
Pages:
4
DOI:
10.1007/bf03000166
Date:
June, 2004
File:
PDF, 583 KB
english, 2004
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