Optimal Design of Electromagnetically Actuated MEMS Cantilevers
Di Barba, Paolo, Gotszalk, Teodor, Majstrzyk, Wojciech, Mognaschi, Maria, Orłowska, Karolina, Wiak, Sławomir, Sierakowski, AndrzejVolume:
18
Language:
english
Journal:
Sensors
DOI:
10.3390/s18082533
Date:
August, 2018
File:
PDF, 3.40 MB
english, 2018