Modeling and Fabrication of Micro FET Pressure Sensor with...

Sensors 2007 / 11 Vol. 7; Iss. 12

Modeling and Fabrication of Micro FET Pressure Sensor with Circuits

Dai, Ching-Liang, Tai, Yao-Wei, Kao, Pin-Hsu
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Volume:
7
Language:
english
Journal:
Sensors
DOI:
10.3390/s7123386
Date:
November, 2007
File:
PDF, 2.27 MB
english, 2007
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