Optimization of novel superjunction LDMOS with partial low K layer
Wu, Lijuan, Zhang, Yinyan, Yang, Hang, Song, Yue, Yuan, Na, Lei, Bing, Hu, Limin, Wu, YiqingLanguage:
english
Journal:
Superlattices and Microstructures
DOI:
10.1016/j.spmi.2018.07.038
Date:
August, 2018
File:
PDF, 743 KB
english, 2018