AIP Conference Proceedings [AIP Publishing LLC ADVANCES IN CRYOGENIC ENGINEERING: Transactions of the Cryogenic Engineering Conference - CEC - Anchorage, Alaska, USA (17–21 June 2013)] - Ultra-high heat flux cooling characteristics of cryogenic micro-solid nitrogen particles and its application to semiconductor wafer cleaning technology
Ishimoto, Jun, Oh, U, Guanghan, Zhao, Koike, Tomoki, Ochiai, NaoyaYear:
2014
Language:
english
DOI:
10.1063/1.4860828
File:
PDF, 857 KB
english, 2014