Spatially resolved characterization of a dc magnetron...

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Plasma Sources Science and Technology 2018 / 07

Spatially resolved characterization of a dc magnetron plasma using optical emission spectroscopy

Ries, Stefan, Bibinov, Nikita, Rudolph, Marcel, Schulze, Julian, Mraz, Stanislav, Schneider, Jochen M, Awakowicz, Peter
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Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aad6d9
Date:
July, 2018
File:
PDF, 1.18 MB
english, 2018
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