3D profiling of rough silicon carbide surfaces by coherence...

Applied Optics 2018 / 04 Vol. 57; Iss. 10

3D profiling of rough silicon carbide surfaces by coherence scanning interferometry using a femtosecond laser

Lu, Yang, Park, Jiyong, Yu, Liandong, Kim, Seung-Woo
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Volume:
57
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.57.002584
Date:
April, 2018
File:
PDF, 1.33 MB
english, 2018
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