A self-packaged capacitive humidity sensor with low leakage loss
Yu, Huiyang, Huang, Jianqiu, Xing, Chaojin, Chu, YuzhiYear:
2018
Language:
english
Journal:
IEICE Electronics Express
DOI:
10.1587/elex.15.20180577
File:
PDF, 547 KB
english, 2018