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[OSA Frontiers in Optics - San Jose, California (2009..-..)] Frontiers in Optics 2009/Laser Science XXV/Fall 2009 OSA Optics & Photonics Technical Digest - Table Top Schemes for Nano-Patterning with Extreme Ultraviolet Lasers
Urbanski, Lukasz, Wachulak, Przemyslaw W., Isoyan, Artak, Jian, Fan, Cheng, Yang-Chun, Rocca, Jorge J., Menoni, Carmen S., Marconi, Mario C., Cerrina, FrancoYear:
2009
Language:
english
DOI:
10.1364/fio.2009.ftus2
File:
PDF, 199 KB
english, 2009