Structural, optoelectronic and mechanical properties of...

Materials Science in Semiconductor Processing 2018 / 12 Vol. 88

Structural, optoelectronic and mechanical properties of PECVD Si-C-N films: An effect of substrate bias

Kozak, A.O., Ivashchenko, V.I., Porada, O.K., Ivashchenko, L.A., Tomila, T.V., Manjara, V.S., Klishevych, G.V.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
88
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.07.023
Date:
December, 2018
File:
PDF, 1.13 MB
english, 2018
Conversion to is in progress
Conversion to is failed