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Structural, optoelectronic and mechanical properties of PECVD Si-C-N films: An effect of substrate bias
Kozak, A.O., Ivashchenko, V.I., Porada, O.K., Ivashchenko, L.A., Tomila, T.V., Manjara, V.S., Klishevych, G.V.Volume:
88
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.07.023
Date:
December, 2018
File:
PDF, 1.13 MB
english, 2018