[IEEE 2017 Sixth Asia-Pacific Conference on Antennas and Propagation (APCAP) - Xi'an, China (2017.10.16-2017.10.19)] 2017 Sixth Asia-Pacific Conference on Antennas and Propagation (APCAP) - Modified silicon micromachining process with air cavities and silicon-to-air transitions for low-loss millimeter-wave antenna tape-out

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