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IEEE Transactions on Semiconductor Manufacturing 2018

Fault Detection Strategy based on Weighted Distance of k Nearest Neighbors for Semiconductor Manufacturing Processes

Zhang, Cheng, Gao, Xianwen, Li, Yuan, Feng, Liwei
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Year:
2018
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2018.2857818
File:
PDF, 1020 KB
english, 2018
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