Flat Panel Display Manufacturing || Thin-Film PVD: Materials, Processes, and Equipment
Souk, Jun, Morozumi, Shinji, Luo, Fang-Chen, Bita, IonVolume:
10.1002/97
Year:
2018
Language:
english
DOI:
10.1002/9781119161387.ch11_02
File:
PDF, 954 KB
english, 2018