A study of the effect of the use of immersion fluid on the angular errors in dials fabricated by lift-off photolithography
Kruchinin, D. Yu., Farafontova, E. P.Volume:
83
Language:
english
Journal:
Journal of Optical Technology
DOI:
10.1364/jot.83.000069
Date:
January, 2016
File:
PDF, 186 KB
english, 2016