Study on Polishing Mechanism of Single Crystal Substrate by...

Journal of the Japan Society for Precision Engineering 2014 Vol. 80; Iss. 1

Study on Polishing Mechanism of Single Crystal Substrate by UV-Excitation

TOUGE, Mutsumi, NAGANO, Takugi, TAGAWA, Tomohiko, SAKAMOTO, Takeshi, YOKOI, Hiroyuki, IWAMOTO, Chihiro, WATANABE, Junji
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Volume:
80
Year:
2014
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.80.112
File:
PDF, 6.96 MB
2014
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