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Microelectromechanical Resonant Accelerometer Designed with a High Sensitivity
Zhang, Jing, Su, Yan, Shi, Qin, Qiu, An-PingVolume:
15
Language:
english
Journal:
Sensors
DOI:
10.3390/s151229803
Date:
December, 2015
File:
PDF, 5.01 MB
english, 2015