Self-Aligned Process for Selectively Etched p-GaN-Gated...

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IEEE Transactions on Electron Devices 2018

Self-Aligned Process for Selectively Etched p-GaN-Gated AlGaN/GaN-on-Si HFETs

Lukens, Gerrit, Hahn, Herwig, Kalisch, Holger, Vescan, Andrei
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Year:
2018
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2018.2860634
File:
PDF, 2.06 MB
english, 2018
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