Comb-referenced frequency-sweeping interferometry for precisely measuring large stepped structures
Zhang, Weipeng, Wei, Haoyun, Yang, Honglei, Wu, Xuejian, Li, YanVolume:
57
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.57.001247
Date:
February, 2018
File:
PDF, 1.13 MB
english, 2018