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Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching
Tielen, Viktor, Bellouard, YvesVolume:
5
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi5030697
Date:
September, 2014
File:
PDF, 6.61 MB
english, 2014