Three-Dimensional Glass Monolithic Micro-Flexure Fabricated...

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Tielen, Viktor, Bellouard, Yves
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Volume:
5
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi5030697
Date:
September, 2014
File:
PDF, 6.61 MB
english, 2014
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