Multi-stage phononic crystal structure for anchor-loss reduction of thin-film piezoelectric-on-silicon microelectromechanical-system resonator
Bao, Fei-Hong, Bao, Lei-Lei, Li, Xin-Yi, Khan, Muhammad Ammar, Wu, Hua-Ye, Qin, Feng, Zhang, Ting, Zhang, Yi, Bao, Jing-Fu, Zhang, Xiao-ShengVolume:
11
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.11.067201
Date:
June, 2018
File:
PDF, 10.75 MB
english, 2018