Effective patterning and cleaning of graphene by plasma...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2018 / 09 Vol. 36; Iss. 5

Effective patterning and cleaning of graphene by plasma etching and block copolymer lithography for nanoribbon fabrication

Arias-Zapata, Javier, Ferrah, Djawhar, Mehedi, Hasan-al, Cunge, Gilles, Zelsmann, Marc
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Volume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5035333
Date:
September, 2018
File:
PDF, 4.01 MB
english, 2018
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