Design, fabrication and characterization of laser patterned LTCC micro hotplate with stable interconnects for gas sensor platform
Kharbanda, D. K., Suri, N., Khanna, P. K.Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-4079-8
Date:
August, 2018
File:
PDF, 1.53 MB
english, 2018