CMOS Platform for Atomic-Scale Device Fabrication

Nanotechnology 2018 / 08

CMOS Platform for Atomic-Scale Device Fabrication

Škereň, Tomáš, Pascher, Nikola, Garnier, Arnaud, Reynaud, Patrick, Rolland, Emmanuel, Thuaire, Aurélie, Widmer, Daniel, Jehl, Xavier, Fuhrer, Andreas
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Language:
english
Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aad7ab
Date:
August, 2018
File:
PDF, 4.46 MB
english, 2018
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