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[IEEE 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Roma (2018.5.22-2018.5.25)] 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Nonlinear spring tuning by electrostatic combs in micro mirror scanner
Hane, Kazuhiro, Izawa, Takashi, Sasaki, TakashiYear:
2018
DOI:
10.1109/DTIP.2018.8394239
File:
PDF, 731 KB
2018