Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy
Lee, Jinhyung, Kim, Jong Cheol, Kim, Jongsik, Singh, Rajiv K., Arjunan, Arul C., Lee, HaigunVolume:
660
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.07.002
Date:
August, 2018
File:
PDF, 1.56 MB
english, 2018