Suspended GaN beams and membranes on Si as a platform for...

Journal of Micromechanics and Microengineering 2018 / 10 Vol. 28; Iss. 10

Suspended GaN beams and membranes on Si as a platform for waveguide-based THz applications

Krause, S, Desmaris, V, Pavolotsky, A, Meledin, D, Belitsky, V
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Volume:
28
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aacf5c
Date:
October, 2018
File:
PDF, 2.44 MB
english, 2018
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