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[OSA CLEO: Applications and Technology - San Jose, California (2015..-..)] CLEO: 2015 - Fabrication of Gratings with Low Spacing Error by the Dual-Beam Exposure System with Spherical Lenses
Wang, Shiwei, Zeng, LijiangYear:
2015
Language:
english
DOI:
10.1364/cleo_at.2015.jth2a.104
File:
PDF, 136 KB
english, 2015