Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2018 / 7 Vol. 12; Iss. 4
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Composition and Structure of a Nanofilm Multilayer System of the SiO2/Si/CoSi2/Si(111) Type Obtained via Ion Implantation
Ergashov, Y. S., Umirzakov, B. E.Volume:
12
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/s1027451018040298
Date:
July, 2018
File:
PDF, 444 KB
english, 2018