Optical, structural, and mechanical properties of silicon oxynitride films prepared by pulsed magnetron sputtering
Tang, Chien-Jen, Jaing, Cheng-Chung, Tien, Chuen-Lin, Sun, Wei-Chiang, Lin, Shih-ChinVolume:
56
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.56.00C168
Date:
February, 2017
File:
PDF, 1.27 MB
english, 2017