Deposition and surface modification of SiOf films with low dielectric constant
Seoghyeong Lee, Jae-Yoon Yoo, Jong-Wan ParkVolume:
3
Language:
english
Pages:
5
DOI:
10.1007/bf03025960
Date:
June, 1997
File:
PDF, 1.82 MB
english, 1997