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[OSA Optical Interference Coatings - Tucson, Arizona (2010..-..)] Optical Interference Coatings - In situ Thickness Determination of Multilayered Structures Using Single Wavelength Ellipsometry and Reverse Engineering

Rademacher, Daniel, Vergöhl, Michael
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Year:
2010
Language:
english
DOI:
10.1364/oic.2010.tuc11
File:
PDF, 167 KB
english, 2010
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