[OSA Optical Interference Coatings - Tucson, Arizona (2010..-..)] Optical Interference Coatings - In situ Thickness Determination of Multilayered Structures Using Single Wavelength Ellipsometry and Reverse Engineering
Rademacher, Daniel, Vergöhl, MichaelYear:
2010
Language:
english
DOI:
10.1364/oic.2010.tuc11
File:
PDF, 167 KB
english, 2010