Effect of rinsing and drying on silicon surface cleaning...

Metals and Materials International 2002 / 10 Vol. 8; Iss. 5

Effect of rinsing and drying on silicon surface cleaning for epitaxial growth

Hyoun Woo Kim, Kwang-sik Kim, Woon-suk Hwang, Rafael Reif
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
8
Language:
english
Pages:
5
DOI:
10.1007/bf03027244
Date:
October, 2002
File:
PDF, 353 KB
english, 2002
Conversion to is in progress
Conversion to is failed