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Influence of laser treatment on the electrical properties of plasma-enhanced-atomic-layer-deposited TiO2thin films
Jeon-Ho Kim, Won-Jae Lee, Jin-Dong Kim, Soon-Gil YoonVolume:
11
Language:
english
Pages:
5
DOI:
10.1007/bf03027330
Date:
August, 2005
File:
PDF, 477 KB
english, 2005