Growth assessment and scrutinize dielectric reliability of c-axis oriented insulating AlN thin films in MIM structures for microelectronics applications
Pawar, Shuvam, Singh, Kirandeep, Sharma, Shubham, Pandey, Akhilesh, Dutta, Shankar, Kaur, DavinderVolume:
219
Language:
english
Journal:
Materials Chemistry and Physics
DOI:
10.1016/j.matchemphys.2018.08.013
Date:
November, 2018
File:
PDF, 2.70 MB
english, 2018