Effect of target composition on the microstructural, mechanical, and corrosion properties of TiAlN thin films deposited by high-power impulse magnetron sputtering
Chang, Chi-Lung, Yang, Fu-ChiLanguage:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2018.08.023
Date:
August, 2018
File:
PDF, 11.91 MB
english, 2018