Correlation of depth resolution and preferential sputtering...

Thin Solid Films 2018 / 09 Vol. 662

Correlation of depth resolution and preferential sputtering in depth profiles of thin layers by Secondary Ion Mass Spectrometry (SIMS)

Hofmann, S., Lian, S.Y., Han, Y.S., Deng, Q.R., Wang, J.Y.
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Volume:
662
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.07.045
Date:
September, 2018
File:
PDF, 756 KB
english, 2018
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