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Correlation of depth resolution and preferential sputtering in depth profiles of thin layers by Secondary Ion Mass Spectrometry (SIMS)
Hofmann, S., Lian, S.Y., Han, Y.S., Deng, Q.R., Wang, J.Y.Volume:
662
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.07.045
Date:
September, 2018
File:
PDF, 756 KB
english, 2018